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1

Determination of doping and temperature-dependent elastic constants of degenerately doped silicon from MEMS resonators

Jaakkola, Antti, Prunnila, Mika, Pensala, Tuomas, Dekker, James, Pekko, Panu

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2014

Language:

english

File:

PDF, 4.33 MB

english, 2014

2

Ultra-thin free-standing single crystalline silicon membranes with strain control

Shchepetov, A., Prunnila, M., Alzina, F., Schneider, L., Cuffe, J., Jiang, H., Kauppinen, E. I., Sotomayor Torres, C. M., Ahopelto, J.

Journal:

Applied Physics Letters

Year:

2013

Language:

english

File:

PDF, 1.18 MB

english, 2013

3

Lifetimes of Confined Acoustic Phonons in Ultrathin Silicon Membranes

Cuffe, J., Ristow, O., Chávez, E., Shchepetov, A., Chapuis, P-O., Alzina, F., Hettich, M., Prunnila, M., Ahopelto, J., Dekorsy, T., Sotomayor Torres, C. M.

Journal:

Physical Review Letters

Year:

2013

Language:

english

File:

PDF, 519 KB

english, 2013

4

[IEEE 2012 IEEE International Frequency Control Symposium (FCS) - Baltimore, MD, USA (2012.05.21-2012.05.24)] 2012 IEEE International Frequency Control Symposium Proceedings - Temperature compensated resonance modes of degenerately n-doped silicon MEMS resonators

Jaakkola, Antti, Prunnila, Mika, Pensala, Tuomas

Year:

2012

Language:

english

File:

PDF, 2.25 MB

english, 2012

5

[IEEE 2012 IEEE International Frequency Control Symposium (FCS) - Baltimore, MD, USA (2012.05.21-2012.05.24)] 2012 IEEE International Frequency Control Symposium Proceedings - Bulk acoustic wave propagation characteristics in degenerately n-doped Si

Pensala, Tuomas, Prunnila, Mika, Jaakkola, Antti

Year:

2012

Language:

english

File:

PDF, 2.31 MB

english, 2012

6

[IEEE 2013 19th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC) - Berlin, Germany (2013.09.25-2013.09.27)] 19th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC) - Thermal conductivity reduction in Si free-standing membranes investigated using Raman thermometry

Reparaz, J. S., Chavez-Angel, E., Gomis-Bresco, J., Wagner, M. R., Shchepetov, A., Prunnila, M., Ahopelto, J., Alzina, F., Sotomayor Torres, C. M.

Year:

2013

Language:

english

File:

PDF, 438 KB

english, 2013

7

Reduction of the thermal conductivity in free-standing silicon nano-membranes investigated by non-invasive Raman thermometry

Chávez-Ángel, E., Reparaz, J. S., Gomis-Bresco, J., Wagner, M. R., Cuffe, J., Graczykowski, B., Shchepetov, A., Jiang, H., Prunnila, M., Ahopelto, J., Alzina, F., Sotomayor Torres, C. M.

Journal:

Year:

2014

Language:

english

File:

PDF, 862 KB

english, 2014

8

[IEEE 2011 IEEE International Ultrasonics Symposium (IUS) - Orlando, FL, USA (2011.10.18-2011.10.21)] 2011 IEEE International Ultrasonics Symposium - Temperature compensation of silicon MEMS Resonators by Heavy Doping

Pensala, Tuomas, Jaakkola, Antti, Prunnila, Mika, Dekker, James

Year:

2011

Language:

english

File:

PDF, 171 KB

english, 2011

9

Radiation detectors fabricated on high-purity GaAs epitaxial materials

Wu, X, Kostamo, P, Gädda, A, Nenonen, S, Riekkinen, T, Härkönen, J, Salonen, J, Andersson, H, Zhilyaev, Y, Fedorov, L, Eränen, S, Mattila, M, Lipsanen, H, Prunnila, M, Kalliopuska, J, Oja, A

Journal:

Journal of Instrumentation

Year:

2014

Language:

english

File:

PDF, 1.93 MB

english, 2014

10

Si, GaAs, and InP as cathode materials for photon-enhanced thermionic emission solar cells

Varpula, Aapo, Tappura, Kirsi, Prunnila, Mika

Journal:

Solar Energy Materials and Solar Cells

Year:

2015

Language:

english

File:

PDF, 846 KB

english, 2015

11

Acoustic phonon propagation in ultra-thin Si membranes under biaxial stress field

Graczykowski, B, Gomis-Bresco, J, Alzina, F, S Reparaz, J, Shchepetov, A, Prunnila, M, Ahopelto, J, M Sotomayor Torres, C

Journal:

New Journal of Physics

Year:

2014

Language:

english

File:

PDF, 954 KB

english, 2014

12

Tuning Thermal Transport in Ultrathin Silicon Membranes by Surface Nanoscale Engineering

Neogi, Sanghamitra, Reparaz, J. Sebastian, Pereira, Luiz Felipe C., Graczykowski, Bartlomiej, Wagner, Markus R., Sledzinska, Marianna, Shchepetov, Andrey, Prunnila, Mika, Ahopelto, Jouni, Sotomayor-To

Journal:

Year:

2015

Language:

english

File:

PDF, 3.18 MB

english, 2015

13

Reconstructing phonon mean-free-path contributions to thermal conductivity using nanoscale membranes

Cuffe, John, Eliason, Jeffrey K., Maznev, A. A., Collins, Kimberlee C., Johnson, Jeremy A., Shchepetov, Andrey, Prunnila, Mika, Ahopelto, Jouni, Sotomayor Torres, Clivia M., Chen, Gang, Nelson, Keith

Journal:

Physical Review B

Year:

2015

Language:

english

File:

PDF, 597 KB

english, 2015

14

Design Rules for Temperature Compensated Degenerately n-Type-Doped Silicon MEMS Resonators

Jaakkola, Antti, Prunnila, Mika, Pensala, Tuomas, Dekker, James, Pekko, Panu

Journal:

Journal of Microelectromechanical Systems

Year:

2015

Language:

english

File:

PDF, 1.27 MB

english, 2015

15

Nanophononics: state of the art and perspectives

Volz, Sebastian, Ordonez-Miranda, Jose, Shchepetov, Andrey, Prunnila, Mika, Ahopelto, Jouni, Pezeril, Thomas, Vaudel, Gwenaelle, Gusev, Vitaly, Ruello, Pascal, Weig, Eva M., Schubert, Martin, Hettich,

Journal:

The European Physical Journal B / Condensed Matter and Complex Systems

Year:

2016

Language:

english

File:

PDF, 2.24 MB

english, 2016

16

SPIE Proceedings [SPIE SPIE Microtechnologies - Barcelona, Spain (Monday 8 May 2017)] Smart Sensors, Actuators, and MEMS VIII - Comparison of methods for static charge energy harvesting on aircraft

Fonseca, Luis, Prunnila, Mika, Peiner, Erwin, Kiziroglou, M. E., Becker, Th., Yeatman, E. M., Schmid, U., Evans, J. W., Wright, P. K.

Year:

2017

Language:

english

File:

PDF, 411 KB

english, 2017

17

SPIE Proceedings [SPIE SPIE Microtechnologies - Barcelona, Spain (Monday 8 May 2017)] Smart Sensors, Actuators, and MEMS VIII - Temperature simulation at ZnO surface processed by laser interference lithography

Fonseca, Luis, Prunnila, Mika, Peiner, Erwin, Parellada-Monreal, L., Martinez-Calderón, M., Castro-Hurtado, I., Rodríguez, A., Olaizola, S. M., Gomez-Aranzadi, M., Ayerdi, I., Castaño, E., Mandayo, G.

Year:

2017

Language:

english

File:

PDF, 747 KB

english, 2017

18

SPIE Proceedings [SPIE SPIE Microtechnologies - Barcelona, Spain (Monday 8 May 2017)] Smart Sensors, Actuators, and MEMS VIII - Actuation control of a PiezoMEMS biomimetic robotic jellyfish

Fonseca, Luis, Prunnila, Mika, Peiner, Erwin, Alejandre, Alvaro, Olszewski, Oskar, Jackson, Nathan

Year:

2017

Language:

english

File:

PDF, 958 KB

english, 2017

19

Thermoelectric thermal detectors based on ultra-thin heavily doped single-crystal silicon membranes

Varpula, Aapo, Timofeev, Andrey V., Shchepetov, Andrey, Grigoras, Kestutis, Hassel, Juha, Ahopelto, Jouni, Ylilammi, Markku, Prunnila, Mika

Journal:

Applied Physics Letters

Year:

2017

Language:

english

File:

PDF, 1.22 MB

english, 2017

20

SPIE Proceedings [SPIE SPIE Microtechnologies - Barcelona, Spain (Monday 8 May 2017)] Smart Sensors, Actuators, and MEMS VIII - Innovative metal thermo-compression wafer bonding for microelectronics and MEMS devices

Fonseca, Luis, Prunnila, Mika, Peiner, Erwin, Rebhan, B., Dragoi, V.

Year:

2017

Language:

english

File:

PDF, 848 KB

english, 2017

21

Microelectrode Array With Transparent ALD TiN Electrodes

Ryynänen, Tomi, Pelkonen, Anssi, Grigoras, Kestutis, Ylivaara, Oili M. E., Hyvärinen, Tanja, Ahopelto, Jouni, Prunnila, Mika, Narkilahti, Susanna, Lekkala, Jukka

Journal:

Frontiers in Neuroscience

Year:

2019

Language:

english

File:

PDF, 5.64 MB

english, 2019

22

Nanobolometer with ultralow noise equivalent power

Kokkoniemi, Roope, Govenius, Joonas, Vesterinen, Visa, Lake, Russell E., Gunyhó, András M., Tan, Kuan Y., Simbierowicz, Slawomir, Grönberg, Leif, Lehtinen, Janne, Prunnila, Mika, Hassel, Juha, Lammine

Journal:

Communications Physics

Year:

2019

Language:

english

File:

PDF, 1.35 MB

english, 2019

23

Two-dimensional metallic state in silicon-on-insulator structures

G. Brunthaler, B. Lindner, G. Pillwein, S. Griesser, M. Prunnila, J. Ahopelto

Journal:

Physica E: Low-dimensional Systems and Nanostructures

Year:

2004

Language:

english

File:

PDF, 513 KB

english, 2004

24

Two sub-band conductivity of Si quantum well

Mika Prunnila, Jouni Ahopelto

Journal:

Physica E: Low-dimensional Systems and Nanostructures

Year:

2006

Language:

english

File:

PDF, 168 KB

english, 2006

25

Self-aligned doping profiles in nanoscale silicon structures

Jouni Ahopelto, Mika Prunnila, Eeva Pursula

Journal:

Physica E: Low-dimensional Systems and Nanostructures

Year:

2006

Language:

english

File:

PDF, 193 KB

english, 2006

26

Small mass enhancement near the metal–insulator transition in gated silicon inversion layers

B. Lindner, G. Pillwein, G. Brunthaler, J. Ahopelto, M. Prunnila

Journal:

Physica E: Low-dimensional Systems and Nanostructures

Year:

2006

Language:

english

File:

PDF, 359 KB

english, 2006

27

Low temperature transport properties of thin SOI MOSFETs

M Prunnila, J Ahopelto, F Gamiz

Journal:

Superlattices and Microstructures

Year:

2003

Language:

english

File:

PDF, 240 KB

english, 2003

28

A comprehensive study of carrier velocity modulation in DGSOI transistors

C. Sampedro, F. Gámiz, A. Godoy, M. Prunnila, J. Ahopelto

Journal:

Solid-State Electronics

Year:

2005

Language:

english

File:

PDF, 468 KB

english, 2005

29

Electron mobility and magneto transport study of ultra-thin channel double-gate Si MOSFETs

M. Prunnila, J. Ahopelto, F. Gamiz

Journal:

Solid-State Electronics

Year:

2005

Language:

english

File:

PDF, 622 KB

english, 2005

30

Application of superconductor–semiconductor Schottky barrier for electron cooling

Alexander Savin, Mika Prunnila, Jouni Ahopelto, Pasi Kivinen, Päivi Törmä, Jukka Pekola

Journal:

Physica B: Condensed Matter

Year:

2003

Language:

english

File:

PDF, 187 KB

english, 2003

31

Silicon quantum point contact with aluminum gate

M Prunnila, S Eränen, J Ahopelto, A Manninen, M Kamp, M Emmerling, A Forchel, A Kristensen, B.S Sorensen, P.E Lindelof, A Gustafsson

Journal:

Materials Science and Engineering: B

Year:

2000

Language:

english

File:

PDF, 484 KB

english, 2000

32

Electron–phonon coupling in degenerate silicon-on-insulator film probed using superconducting Schottky junctions

M Prunnila, J Ahopelto, A.M Savin, P.P Kivinen, J.P Pekola, A.J Manninen

Journal:

Physica E: Low-dimensional Systems and Nanostructures

Year:

2002

Language:

english

File:

PDF, 136 KB

english, 2002

33

Transport properties of double-gate SiO2–Si–SiO2 quantum well

Mika Prunnila, Jouni Ahopelto, Hiroyuki Sakaki

Journal:

physica status solidi (a)

Year:

2005

Language:

english

File:

PDF, 572 KB

english, 2005

34

Observations of confined acoustic phonons in silicon membranes

C. M. Sotomayor Torres, A. Zwick, F. Poinsotte, J. Groenen, M. Prunnila, J. Ahopelto, A. Mlayah, V. Paillard

Journal:

physica status solidi (c)

Year:

2004

Language:

english

File:

PDF, 196 KB

english, 2004

35

Electron-phonon heat transport in degenerate Si at low temperatures

P. Kivinen, M. Prunnila, A. Savin, P. Törmä, J. Pekola, J. Ahopelto

Journal:

physica status solidi (c)

Year:

2004

Language:

english

File:

PDF, 183 KB

english, 2004

36

Acoustic Phonon Tunneling and Heat Transport due to Evanescent Electric Fields

Prunnila, Mika, Meltaus, Johanna

Journal:

Physical Review Letters

Year:

2010

Language:

english

File:

PDF, 465 KB

english, 2010

37

Electronic Cooling and Hot Electron Effects in Heavily Doped SilicononInsulator Film

Savin, A, Pekola, J, Prunnila, M, Ahopelto, J, Kivinen, P

Journal:

Physica Scripta

Year:

2004

Language:

english

File:

PDF, 218 KB

english, 2004

38

Intervalley-Scattering-Induced Electron-Phonon Energy Relaxation in Many-Valley Semiconductors at Low Temperatures

Prunnila, M., Kivinen, P., Savin, A., Törmä, P., Ahopelto, J.

Journal:

Physical Review Letters

Year:

2005

Language:

english

File:

PDF, 288 KB

english, 2005

39

Efficient electronic cooling in heavily doped silicon by quasiparticle tunneling

Savin, A. M., Prunnila, M., Kivinen, P. P., Pekola, J. P., Ahopelto, J., Manninen, A. J.

Journal:

Applied Physics Letters

Year:

2001

Language:

english

File:

PDF, 515 KB

english, 2001

40

Electron–acoustic-phonon energy-loss rate in multicomponent electron systems with symmetric and asymmetric coupling constants

Journal:

Physical Review B

Year:

2007

Language:

english

File:

PDF, 168 KB

english, 2007

41

Electronâphonon heat transport and electronic thermal conductivity in heavily doped silicon-on-insulator film

Kivinen, P., Savin, A., Zgirski, M., ToÌrmaÌ, P., Pekola, J., Prunnila, M., Ahopelto, J.

Journal:

Journal of Applied Physics

Year:

2003

Language:

english

File:

PDF, 423 KB

english, 2003

42

Flat single crystal Ge membranes for sensors and opto-electronic integrated circuitry

Shah, V.A., Myronov, M., Rhead, S.D., Halpin, J.E., Shchepetov, A., Prest, M.J., Prunnila, M., Whall, T.E., Parker, E.H.C., Leadley, D.R.

Journal:

Solid-State Electronics

Year:

2014

Language:

english

File:

PDF, 1.42 MB

english, 2014

43

[IEEE 2013 14th International Conference on Ultimate Integration on Silicon (ULIS 2013) - Coventry (2013.3.19-2013.3.21)] 2013 14th International Conference on Ultimate Integration on Silicon (ULIS) - Cooltronics: A new low-temperature tunneling-technology based on Silicon

Whall, T. E., Prest, M. J., Richardson-Bullock, J. S., Shah, V. A., Myronov, M., Parker, E. H. C., Leadley, D. R., Prunnila, M., Gunnarsson, D., Brien, T., Morozov, D., Mauskopf, P.

Year:

2013

Language:

english

File:

PDF, 1018 KB

english, 2013

44

[IEEE 2013 14th International Conference on Ultimate Integration on Silicon (ULIS 2013) - Coventry (2013.3.19-2013.3.21)] 2013 14th International Conference on Ultimate Integration on Silicon (ULIS) - Using platinum silicide as a superconductor for silicon electron coolers

Prest, M. J., Zhao, Q. T., Muhonen, J. T., Shah, V. A., Richardson-Bullock, J. S., Prunnila, M., Gunnarsson, D., Whall, T. E., Parker, E. H. C., Leadley, D. R.

Year:

2013

Language:

english

File:

PDF, 747 KB

english, 2013

45

Superconducting platinum silicide for electron cooling in silicon

Prest, M.J., Richardson-Bullock, J.S., Zhao, Q.T., Muhonen, J.T., Gunnarsson, D., Prunnila, M., Shah, V.A., Whall, T.E., Parker, E.H.C., Leadley, D.R.

Journal:

Solid-State Electronics

Year:

2015

Language:

english

File:

PDF, 815 KB

english, 2015

46

Solid-state memcapacitive device based on memristive switch

Flak, J, Lehtonen, E, Laiho, M, Rantala, A, Prunnila, M, Haatainen, T

Journal:

Semiconductor Science and Technology

Year:

2014

Language:

english

File:

PDF, 825 KB

english, 2014

47

[IEEE 2014 14th International Workshop on Cellular Nanoscale Networks and their Applications (CNNA) - Notre Dame, IN, USA (2014.7.29-2014.7.31)] 2014 14th International Workshop on Cellular Nanoscale Networks and their Applications (CNNA) - Implementation of a memristor-based solid-state memcapacitive device

Flak, Jacek, Raantala, Arto, Haatainen, Tomi, Prunnila, Mika, Laiho, Mika

Year:

2014

Language:

english

File:

PDF, 174 KB

english, 2014

48

[IEEE 2004 IEEE International SOI Conference - Charleston, SC, USA (4-7 Oct. 2004)] 2004 IEEE International SOI Conference (IEEE Cat. No.04CH37573) - DGSOI devices operated as velocity modulation transistors

Gamiz, F., Sampedro, C., Godoy, A., Prunnila, M., Ahopelto, J.

Year:

2004

Language:

english

File:

PDF, 132 KB

english, 2004

49

[IEEE 2013 14th International Conference on Ultimate Integration on Silicon (ULIS 2013) - Coventry (2013.3.19-2013.3.21)] 2013 14th International Conference on Ultimate Integration on Silicon (ULIS) - Hole-phonon energy loss rate in boron doped silicon

Richardson-Bullock, J. S., Prest, M. J., Prunnila, M., Gunnarsson, D., Shah, V. A., Dobbie, A., Myronov, M., Morris, R. J. H., Whall, T. E., Parker, E. H. C., Leadley, D. R.

Year:

2013

Language:

english

File:

PDF, 564 KB

english, 2013

50

[IEEE Norchip Conference, 2004. - Oslo, Norway (8-9 Nov. 2004)] Proceedings Norchip Conference, 2004. - Silicon self-switching-device based logic gates operating at room temperature

Aberg, M., Saijets, J., Pursula, E., Prunnila, M., Ahopelto, J.

Year:

2004

Language:

english

File:

PDF, 279 KB

english, 2004